JPH0318913Y2 - - Google Patents

Info

Publication number
JPH0318913Y2
JPH0318913Y2 JP1981152099U JP15209981U JPH0318913Y2 JP H0318913 Y2 JPH0318913 Y2 JP H0318913Y2 JP 1981152099 U JP1981152099 U JP 1981152099U JP 15209981 U JP15209981 U JP 15209981U JP H0318913 Y2 JPH0318913 Y2 JP H0318913Y2
Authority
JP
Japan
Prior art keywords
sample
target
substrate
quantitative analysis
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981152099U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5856956U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15209981U priority Critical patent/JPS5856956U/ja
Publication of JPS5856956U publication Critical patent/JPS5856956U/ja
Application granted granted Critical
Publication of JPH0318913Y2 publication Critical patent/JPH0318913Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP15209981U 1981-10-13 1981-10-13 オージェ定量分析装置 Granted JPS5856956U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15209981U JPS5856956U (ja) 1981-10-13 1981-10-13 オージェ定量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15209981U JPS5856956U (ja) 1981-10-13 1981-10-13 オージェ定量分析装置

Publications (2)

Publication Number Publication Date
JPS5856956U JPS5856956U (ja) 1983-04-18
JPH0318913Y2 true JPH0318913Y2 (en]) 1991-04-22

Family

ID=29944765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15209981U Granted JPS5856956U (ja) 1981-10-13 1981-10-13 オージェ定量分析装置

Country Status (1)

Country Link
JP (1) JPS5856956U (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561669U (en]) * 1979-06-19 1981-01-09

Also Published As

Publication number Publication date
JPS5856956U (ja) 1983-04-18

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